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Fabrication of biogenic guanine crystal/ferromagnetic film hybrid plate for micro-optical MEMS.

机译:微光学MEMS生物鸟嘌呤晶体/铁磁薄膜混合板的制备。

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Bio-photonic crystals in fish and so on have attracted much attention due to their unique biological nano-sturcture. Guanine crystals of fish scales are the thin plate having the interesting properties such as high reflection and optical biaxiality. It has been demonstrated that the magnetic field controls the light reflection intensity from the guanine crystal plates [1], [2]. This reflection anisotropy is generated by a diamagnetic orientation of the guanine crystal with the magnetic filed more than 100 mT (goldfish guanine case). From the viewpoint of optical devices application, the reduction of magnetic field amplitude is effective. In this study, we have prepared a hybrid thin film consisting of diamagnetic guanine crystal plates and soft ferromagnetic material, and demonstrated that the hybridization enables to orient the guanine plate with the magnetic field of several mT. A ferromagnetic thin film was developed by sputtering method. After the chamber was evacuated to a pressure below 5×10-7 Pa, the sputtering was carried out with DC power of 50 W at sputter gas pressures of 0.53 Pa in an Ar gas atmosphere. A permalloy film with a thickness of 5-30 nm was formed on the dried surface of the stacked biogenic guanine crystal plates considering the typical thickness of guanine plates of goldfish is around 100 nm. Figure 1(a) shows the SEM image of guanine crystal plate after depositing the permalloy film of 5 nm in thickness. The permalloy entirely covers the guanine crystal surface but the edge of guanine plate is clearly seen. Next, the hybrid plate has been detached from the substrate and the dynamic behavior under the magnetic field has been investigated. Figure 1(b)-(d) shows optical microscope images of the hybrid plate having the 5-nm-thick permalloy film under the magnetic field generated by a three-axis Helmholtz coil. The hybrid plate still tends to float in water. When the rotating field of x-y plane is applied, the hybrid plate rotates according to the magnetic field as shown in Fig.1 (b) and (c), and the reflected light from the plate can be confirmed. When z-direction field is applied, hybrid plate easily stands up (see Fig.1 (d)) unlike pure guanine crystal which is oriented so that the long axis of guanine plate takes orthogonal to the magnetic field due to the gravity [2]. In the pure guanine case, it has been reported that more than 2 T magnetic field is needed to make the guanine crystal stand up against the gravity [3]. These hybrid plate motions arise from the strong shape anisotropy of permally film which fixes the magnetization direction parallel to the long axis direction of guanine plate due to the elongated shape. Critical magnetic field amplitudes for controlling the plate motion, which are 0.6 mT for in-plane motion and 3 mT for standing up, drastically decrease compared to the diamagnetic orientation of the pure guanine crystal.
机译:由于其独特的生物纳米脱落,鱼类等生物光子晶体引起了很多关注。鱼鳞的鸟嘌呤晶体是具有诸如高反射和光学双齿性等有趣性质的薄板。已经证明,磁场控制来自鸟嘌呤晶体板的光反射强度[1],[2]。这种反射各向异性由鸟嘌呤晶体的抗磁化取向产生,磁性归档超过100毫升(金鱼鸟嘌呤盒)。从光学器件应用的角度来看,磁场幅度的降低是有效的。在这项研究中,我们制备了一种由抗磁性鸟嘌呤晶体板和软铁磁材料组成的混合薄膜,并证明杂交使得与几MT的磁场来定位鸟线。通过溅射法开发了铁磁薄膜。在腔室被抽空到5×10以下的压力之后 -7 PA,在AR气体气氛中以0.53Pa的溅射气体压力为50W的DC功率进行溅射。考虑到金鱼的鸟嘌呤板的典型厚度约为100nm,在堆叠的生成的鸟嘌呤晶体板的干燥表面上形成厚度为5-30nm的渗透膜膜。图1(a)显示沉积厚度5nm的渗透合金膜后鸟嘌呤晶体板的SEM图像。 Permoloy完全覆盖了鸟嘌呤晶体表面,但清晰地看到了鸟嘌呤板的边缘。接下来,已经研究了混合板从基板上脱离,并且已经研究了磁场下的动态行为。图1(b) - (d)示出了在由三轴Helmholtz线圈产生的磁场下具有5-nm厚的渗透组合膜的混合板的光学显微镜图像。杂交板仍然漂浮在水中。当施加X-Y平面的旋转场时,混合板根据如图1(b)和(c)所示的磁场旋转,并且可以确认来自板的反射光。当施加Z方向场时,与纯的鸟嘌呤晶体相比,混合板容易突出(参见图1(d)),这与导向的纯鸟嘌呤晶体不同,使得鸟嘌呤板的长轴与由于重力引起的磁场正交[2] 。在纯鸟嘌呤案例中,据报道,需要2个以上的磁场来使鸟嘌呤水晶抵抗重力[3]。这些混合板运动从允许的膜的强形状各向异性产生,该膜的强大形状是由于细长形状而将平行于鸟线的长轴方向平行的磁化方向。与纯鸟嘌呤晶体的抗磁取向相比,控制板运动的临界磁场幅度为0.6mt,用于平面运动,用于站立3毫秒,大幅减少。

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