FABRICATION METHOD OF MICRO-OPTICAL ELEMENTS USING PHOTOIMAGEABLE HYBRID MATERIALS

摘要

The present invention provides with a method for fabricating micro- optical elements comprising: forming a photoimageable hybrid coating layer containing oligo-siloxane containing a polymerizable organic functional group, a photoactive monomer capable of forming a polymer or/and a photochemical initiator monomer initiating polymerization by forming a dimer at the time of illuminating a light on a substrate; and forming a micro-optical element having the structure of a desired shape by illuminating a light on the photoimageable hybrid coating layer.