Mechanical Properties of Ni-Pd Thin Films Fabricated by LIGA Process

摘要

Palmtop tensile and fatigue testing machines were developed in-house for small and thin specimens that were fabricated by the LIGA process. The dimensions of the specimens were selected in accordance with the international standard IEC62047-3, and were 10 micrometers in thickness, 20 micrometers in width, and 500 micrometers in parallel length. Since the loading mechanism and methods of measuring the load and displacement were specially designed, the stiffness of the specimen is quite low compared to that of the conventional large-size specimens. The mechanical properties of electroformed Ni_2Pd_8 and Ni_4Pd_6 alloys were studied with these developed testing machines and excellent values of tensile and fatigue strengths of 2.7 GPa and 1.8 GPa, respectively were obtained in the case of the Ni_4Pd_6 alloy.