The work studies thermal EMF generation in thick-film and thin-film resistors under focused semiconductor laser irradiation.The thermal EMF in film resistors is maximum in the case of laser irradiation of the boundaries of the resistant film contact with electrodes.The signal sign depends on the polarity of resistors brought into the measurement circuit,location of the laser spot on the boundaries of the resistive film contacts with electrodes and on the edges of nonuniformities.Thermal EMF includes direct and pulsed components during local irradiation of the surface of resistors by periodic laser pulses.The frequency and duration of the edge of unipolar EMF pulses on the electrodes of the resistors are equal to the frequency and duration of the laser pulses,respectively.In silver-palladium thick-film resistors,the maximum of the thermal EMF signal can be used to determine the boundaries of the surface section with palladium reduced by hydrogen.
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