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Silver alloy wire for IC packaging solution

机译:IC包装溶液的银合金电线

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摘要

In recent years, copper wire especially palladium coated copper wire interconnects has been quite widely proliferated into mass production. However, the hardness of copper wire requires higher ultrasonic power and bonding force, which lead to higher risk of bond pad crack causing electrical test failure or board level reliability failure. In order to mitigate the risk of wire bond failure, device manufacturer usually reengineer the bond pad fabrication structure or adding over pad metallization (OPM) on bond pad to protect the underneath circuit. This approach adds cost to the wafer fabrication. In order to avoid bond pad crack without reengineering the bond pad, silver alloy wire is proposed as an alternative to cu wire bonding due to its softer material property. In this paper, the authors researched into process development of silver alloy wire, including fine tuning of material properties, wire bond and assembly process optimization, and reliability assessment on various wire bond application including BSOB, low loop wire bonding, and evaluated wire bonding performance on different lead finger finishing. Special attention was placed on package and board level reliability since silver alloy wire is still relatively new in some of the IC packaging application. This paper also discussed the economic and cost consideration of mass volume production implementation for silver alloy wire.
机译:近年来,铜线尤其是钯涂覆的铜线互连已被广泛增殖成批量生产。然而,铜线的硬度需要更高的超声波功率和粘合力,这导致粘接焊盘裂纹的风险较高,导致电气测试失败或板级可靠性故障。为了减轻电线粘合失败的风险,设备制造商通常在粘接垫上重新进入粘接垫制造结构或在焊盘上添加垫金属化(OPM)以保护下部电路。这种方法增加了晶片制造的成本。为了避免粘接焊盘裂缝而不再造粘接垫,因此提出了由于其较软的材料性能而作为Cu线键合的替代方案。本文研究了银合金线的工艺开发,包括材料特性,线键和装配过程优化的微调,以及对各种粘合剂应用的可靠性评估,包括Bsob,低环键合和评估的线键合性能在不同的铅手指整理。特别注意包装和板级可靠性,因为银色合金线在一些IC包装应用中仍然相对较新。本文还讨论了银合金电线大规模生产实施的经济和成本考虑。

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