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Manufacture of High Precision, Multilayer Based Polarimeter Designed for Wide Energy Range from EUV to Soft X-Ray

机译：制造高精度，基于多层的偏振计，设计用于宽能量范围从EUV到软X射线

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The development of a high precision five rotation axes polarimeter using transmission multilayers as polarizers and reflection multilayers as analyzers is presented. In order to cover a wide energy range from EUV to soft X-ray, a set of Mo/Si, Cr/C, Sc/Cr, and W/B_4C multilayers for transmission and reflection have been designed and fabricated. A hexapod support allows to align the polarimeter easily relative to the optical axis, and the instrument is designed to be moved conveniently between different beamlines.

机译：提出了一种高精度五旋转轴偏振镜，其使用变速器多层作为偏振器和反射多层作为分析仪。为了覆盖从EUV到软X射线的宽能量，设计并制造了一组Mo / Si，Cr / C，SC / C，和W / B_4C多层的多层多层。六足支持允许使偏振仪相对于光轴对准，并且仪器设计成在不同的波束线之间方便地移动。

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来源
《International Conference on X-Ray Lasers》|2018年|xxxv 421 p.|共5页
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作者
H. Takenaka; N. Kuwabara; N. Kamachi; S.-Y. Liu; K. Endo; T. Ohchi; S. Ichimaru; H. Kimura; J. Laksman; F. Hennies; W. Grizolli; R. Sankari;
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中图分类 TN24-532;
关键词
EUV; Manufacture; High Precision;

机译：EUV;制造;高精度;
入库时间 2022-08-21 05:48:32

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专利

1. Multilayers for the EUV/soft X-ray range [J] . Schafers F. Physica, B. Condensed Matter . 2000,第1a3期

机译：适用于EUV /软X射线范围的多层
2. Design of an ultrahigh-energy-resolution and wide-energy-range soft X-ray beamline [J] . L. Xue, R. Reininger, Y.-Q. Wu, Journal of synchrotron radiation . 2014,第1期

机译：超高能量分辨率和宽能量范围的软X射线束线的设计
3. Design of a time-compensated EUV and soft X-ray monochromator with multilayer mirrors for high-order harmonics [J] . Poletto L., Tondello G. Laser and Particle Beams . 2001,第1期

机译：具有多层镜的高阶谐波时间补偿EUV和软X射线单色仪的设计
4. Manufacture of High Precision, Multilayer Based Polarimeter Designed for Wide Energy Range from EUV to Soft X-Ray [C] . H. Takenaka, N. Kuwabara, N. Kamachi, International Conference on X-Ray Lasers . 2018

机译：制造高精度，基于多层的偏振计，设计用于宽能量范围从EUV到软X射线
5. Optical constants of materials in the EUV/soft x-ray region for multilayer mirror applications. [D] . Soufli, Regina. 1997

机译：用于多层反射镜的EUV /软X射线区域中材料的光学常数。
6. Design of a multilayer-based collimated plane-grating monochromator for tender X-ray range [O] . Xiaowei Yang, Hongchang Wang, Matthew Hand, -1

机译：X射线范围的基于多层的准直平面光栅单色仪的设计
7. A Soft X-ray Beam-splitting Multilayer Optic for the NASA GEMS Bragg Reflection Polarimeter [O] . Allured, Ryan, Fernandez-Perea, Monica, Soufli, Regina, 2013

机译：用于Nasa GEms布拉格的软X射线分束多层光学器件反射偏光计
8. Optical constants of materials in the EUV/soft x-ray region for multilayer mirror applications [R] . Soufli, R. 1997

机译：用于多层镜应用的EUV /软X射线区域中的材料的光学常数

Manufacture of High Precision, Multilayer Based Polarimeter Designed for Wide Energy Range from EUV to Soft X-Ray

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