Development of Soft X-Ray Microscopy Using Fresnel Zone Plate for Observation of Laser-Induce Surface Dynamics

摘要

X-ray reflective microscope in EUV region has been tried with a Fresnel zone plate (FZP). FZP with an outermost zone width of 0.28 μm and thickness of 250 nm is used as an objective lens. The focal length of FZP is 10 mm at the wavelength of 13.9 nm. Image of a test object has been taken, and the spatial resolution of the measured image is estimated to be less than 1 μm in the case of the magnification of 20.