Design and simulation of a high power CMOS driver for microactuators

摘要

One of the challenges for implementing microactuators into practical applications is to integrate them with monolithic driving circuits. In this paper, a large output power, high voltage CMOS circuit for driving micro electrothermal actuators has been designed and simulated based on the AMIS 0.7 μm technology. In the circuit design, an 8-stage Dickson charge pump is used for producing 36V from 5V supply. Simulated results show that the circuit is capable of outputting 17.5V and 150mW for a 2kX2 external load and a pulse with 17.5V height, which is applicable for the driver of micro electrothermal actuators, since the resistance of many micro electrothermal actuators ranges from 1kΩ to 5kΩ.