Compact Vacuum Web Coating System for RD

摘要

Multi-functional roll-to-roll coating system for R&D was developed. The system features compact size, small footprint and easy maintenance, which are realized by its unique structure; a film winding system supported by the front and rear walls of the chamber and two side doors equipped with process sources i.e. sputter cathodes. By this configuration, the web handling mechanism does not come out from the chamber, and this reduces the space for installation. Both side doors equip with an ion beam source for pretreatment and/or a sputtering cathode for the deposition of various materials including SiO_x, NbO_x, ITO and metals. In addition, the system can be designed to have a configuration of roll-to-roll PECVD system to deposit SiO_x transparent barrier coating. The system has process flexibility suitable for R&D work and is believed to be suitable for the development of flexible electronics such as display devices on film substrates.