首页> 外国专利> Device for one-sided coating of flat substrate in vacuum coating system, comprises a coating source in a coating chamber of the vacuum coating system, and a frame provided with a smooth lower side, a reception opening and an inner profile

Device for one-sided coating of flat substrate in vacuum coating system, comprises a coating source in a coating chamber of the vacuum coating system, and a frame provided with a smooth lower side, a reception opening and an inner profile

机译:用于在真空涂覆系统中对平面基板进行单侧涂覆的装置,包括:在真空涂覆系统的涂覆室中的涂覆源;以及框架,其具有光滑的下侧,容纳开口和内部轮廓

摘要

The device for one-sided coating of flat substrate (4) in a vacuum coating system, comprises a coating source in a coating chamber (1) of the vacuum coating system, and a frame (9) provided with a smooth lower side, a reception opening and an inner profile pointing to the reception opening, where the inner profile is formed equal to an outer profile of the flat substrate insertable into the frame. The flat substrate is insertable into the inner profile of the frame with its rear side in same plane with the lower side of the frame. The frame is movably formed in a continuous coating system. The device for one-sided coating of flat substrate (4) in a vacuum coating system, comprises a coating source in a coating chamber (1) of the vacuum coating system, and a frame (9) provided with a smooth lower side, a reception opening and an inner profile pointing to the reception opening, where the inner profile is formed equal to an outer profile of the flat substrate insertable into the frame. The flat substrate is insertable into the inner profile of the frame with its rear side in same plane with the lower side of the frame. The frame is movably formed in a continuous coating system together with the flat substrate through the vacuum coating system. The frame has a height, which is equal to the thickness of the flat substrate between the coating side and the rear side, and a width at all sides, where the width corresponds to an edge coating width of the substrate, which is determined without frame, with a rear side coating up to highly 1/1000th of the front side coating thickness. The frame is made of flat material, where the height of the frame corresponds to the thickness of the flat substrate between the coating side and the rear side. The frame has a covering part covering the coating side of the narrow edge. The covering part is formed as a separate component, and is connected with the frame in one-piece. The frame adjacent to the lower side is provided with a supporting frame, which engages beneath the flat substrate at the side lying below in a gravitation direction. An independent claim is included for a method for one-sided coating of flat substrates in a vacuum coating system.
机译:一种用于在真空涂覆系统中对平面基板(4)进行一侧涂覆的装置,其包括在真空涂覆系统的涂覆室(1)中的涂覆源,以及具有光滑下侧的框架(9),容纳开口和指向容纳开口的内部轮廓,其中内部轮廓形成为等于可插入框架中的平坦基板的外部轮廓。平坦基板可插入到框架的内部轮廓中,其后侧与框架的下侧在同一平面中。框架以连续涂覆系统可移动地形成。用于在真空涂覆系统中对平坦基板(4)进行单侧涂覆的装置,包括:在真空涂覆系统的涂覆室(1)中的涂覆源;以及具有光滑的下侧的框架(9);容纳开口和指向容纳开口的内部轮廓,其中内部轮廓形成为等于可插入框架中的平坦基板的外部轮廓。平坦基板可以以其后侧与框架的下侧相同的平面插入框架的内部轮廓中。框架通过真空涂覆系统与平坦基板一起在连续涂覆系统中可移动地形成。框架的高度等于在涂覆侧和背面之间的平坦基板的厚度,并且在所有侧面均具有宽度,其中该宽度对应于基板的边缘涂覆宽度,该宽度是在没有框架的情况下确定的。 ,背面涂层的厚度最高可达正面涂层厚度的1/1000。框架由扁平材料制成,其中框架的高度对应于涂层侧和后侧之间的平面基板的厚度。框架具有覆盖窄边缘的涂覆侧的覆盖部分。覆盖部分形成为单独的部件,并且与框架一体地连接。与下侧相邻的框架设置有支撑框架,该支撑框架在重力方向上位于下方的一侧处接合在平坦基板的下方。包括独立权利要求,其涉及在真空涂覆系统中单侧涂覆平坦基板的方法。

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