Substrate support for transporting disk-shaped substrates in vacuum coating systems, comprises recording plane for substrate, transport plane for supporting substrate support on transport device of vacuum deposition system, and webs

摘要

The substrate support (1) comprises a recording plane for a substrate (2), a transport plane (4) for supporting the substrate support on a transport device (5) of a vacuum deposition system, and webs (6) arranged between the recording plane and the transport plane, The webs: comprise web sides extending between the recording plane and the transport plane, a recording-side narrow side lying parallel to the recording plane, and a transport-side narrow side lying parallel to the transport plane; and are connected between the recording plane and the transport plane to form a honeycomb structure. The substrate support (1) comprises a recording plane for a substrate (2), a transport plane (4) for supporting the substrate support on a transport device (5) of a vacuum deposition system, and webs (6) arranged between the recording plane and the transport plane, The webs: comprise web sides extending between the recording plane and the transport plane, a recording-side narrow side lying parallel to the recording plane, and a transport-side narrow side lying parallel to the transport plane; are connected between the recording plane and the transport plane to form a honeycomb structure; and exhibit a material transparent to infrared radiation. The narrow sides have a smaller width than the web sides. The ratio of the width of the narrow sides to the width of the web sides is 1:10-1:30. The honeycomb of the honeycomb structure is formed in rectangular, hexagonal, or rhomboid form.