Integrated Experimental and Numerical Study of Thermomechanical Resist Removal-Cleaning Performance Using Cryogenic Micro-Solid Nitrogen Spray

摘要

The fundamental characteristics of the resist removal-cleaning system using cryogenic micro-solid nitrogen spray flow are investigated by a new type of integrated measurement and numerical technique. It can be numerically predicted that the resist removal performance is improved by the scraping effect of impinging micro-solid nitrogen particle fragment in the narrow section between the resist. Furthermore, it is numerically and experimentally founded that the hybrid interactive effects of fluid mechanical force by impingement of micro solid particle and thermomechanical force due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.