Measurement on the Mechanical Properties of SiC Thin Films Based on Square Thin Films Theory

摘要

SiC films made of different methods may have different mechanical properties, so their mechanical properties need to be determined by mechanical property measurement [1]. Since SiC films have stable chemical properties, it's very difficult to be etched [2]. This paper introduce a method for SiC films mechanical property testing without processing SiC. Moreover, in view of the lack of square SiC films' mechanical properties research, this paper also do simulation on it.