New style four-electrode MEMS conductivity chip

摘要

MEMS sensor for solution conductivity measurement has been applied widely which has many advantages such as cheap, accurate, batch fabricate, and good consistent etc. Existent MEMS conductivity sensors usually have planar structure with four short parallel electrodes so that the two voltage electrodes are tend to be polluted and consequently lead to mistakes for the conductivity test system. A new pattern of conductivity chip with an annular voltage electrode to enhance the ability of anti-pollution based on MEMS technology is going to be introduced in this article;the ANSYS simulation is applied to help demonstrate the reasons why the new pattern of conductivity chip has good ability of anti-pollution and the experiment results are also presented to show the performance of the conductivity sensor.