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Microfluidics within a Swagelok??: A MEMS-on-Tube Assembly

机译:Microfluidics在Swagelok内??:一个模管组件

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A novel packaging cum interfacing technique for microfluidic devices is reported. Unlike the conventional approach towards packaging in which the MEMS is first developed and finally packaged, a reverse approach is shown here that integrates the package with the MEMS either at the beginning or within the fabrication process. This new method employs standard glass tubes as substrates on which microfluidic components are fabricated. The tubular-substrate directly translates into a package and an interface, leading to `plug-n-play' devices. Maintaining the total size of the MEMS device within the circumference of the glass tube enables this MEMS-on-tube assembly to be encapsulated within standard Swagelok?? connectors.
机译:报道了一种用于微流体装置的新型包装暨接口技术。与往复式的包装的常规方法不同,其中首先开发MEMS并最终封装,这里示出了反向方法,其在制造过程中与MEMS集成了封装。该新方法采用标准玻璃管作为制造微流体部件的基材。管状基板直接转换为包装和接口,导致“插件-N-Play”设备。在玻璃管的圆周内保持MEMS器件的总尺寸使得能够将该MEMS-在管道组件中封装在标准Swagelok中?连接器。

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