Comparison of the Gas Sensing Properties of Thin Film SnO_2 Produced by RGTO and Pore Wetting Technique

摘要

Two different techniques were used for manufacturing thin films of Sn02: RGTO [1] and pore wetting [2-4]. From the first one, a microstructure formed by nanograins obtained and from the second, a microstructure consisting of nanotubes. These would permit understand the relationship between the microstructure and the electrical response of the thin film. The film of SnO_2 nanotubes shows good sensitivity to volatile gases and an unusual sensitivity even at room temperature.