Cross-talk analysis and experimental results of a CMOS compatible thermopile array for use in a miniaturized infrared micro-spectrometer have been presented. The dynamic response of three neighboring pixels has been analyzed and is validated with the experimental results. It indicates either decreasing the package pressure or wider with gap between elements in order to further reduce the cross talk. A wider trench between elements helps to decrease cross-talk, but not efficiently in terms of optical resolving power. Moreover, the larger element pitch in the array would reduce the spectral resolution. A more effective solution is to operate the array at reduced air pressure, which also contributes to the sensitivity of each thermopile element.
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