Over the past decades, surfaces possessing specially-designed 3D-structures are widely used in the development of products such as micro-lens array, v-grooves, etc. Moreover, some research work [1] shows that a surface with a longitudinal rib structure has a lower shear stress than a smooth surface. This technology can be used in commercial aircraft [2]. In nature, compound eyes and shark skin are typical examples of 3D-structured surfaces. Although there has been extensive research on different types and scale of 3D-structured surfaces, the research work on fabrication and machining of these 3D-structured surfaces is far from complete. Computer Controlled Ultra-precision Polishing (CCUP) is capable of fabricating ultra-precision freeform surfaces with sub-micrometer form accuracy and nanometer surface roughness. The CCUP possesses technological merits over the conventional multi-axis CNC mechanical machining such as micro-milling or grinding. These include: (a) CCUP can process hard-to-machine materials and brittle materials; (b) High surface accuracy with submicrometer form error and surface finish in nanometer range; (c) Less susceptible for tool wear; (d) Different structure surfaces can be generated by modifying tool influence function instead of changing cutting tool with different geometries.
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