THE CURRENT STATE OF ART IN ULTRAPRECISION CUTTING TECHNOLOGY IN JAPAN

摘要

Ultraprecision machining, especially micromachining is a key technology to realize the fabrication of small parts, small mechanisms and small robots with extremely high accuracy. Until now, etching and lithography based technologies are well known in the microfabrication fields, where such a material as silicon oxide is generally utilized. A problem of these technologies is the difficulty of producing 3-dimensional shapes with inclined and sculptured surfaces, which are inevitably required to construct a variety of microproducts. Ultraprecision mechanical machining/ micromachining technology can meet the requirement, using a diamond cutting tool and an ultraprecision machine tool such as a turning lathe or a milling machine with multi-axis control machining function. Multi-axis control ultraprecision machine tools are one solution for improving productivity and accuracy, however, it is difficult to actually implement due to several problems, for example, the interference problem between a cutting tool and a workpiece. Thus, the study presents the current state of 5-axis control ultraprecision machine tools in Japan and a machined example of small workpieces with a complicated shape by making use of 5-axis control machining function.