MEMS Fabrication Course for Pressure Sensors, Flow Sensors, Fluidic Channels and Micro-Pumps

摘要

This paper describes a simple, reliable; bulk micro-machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for pressure sensors, flow sensors, micro-pumps, and microfluidic packaging in a ten week fabrication course are reported.