Depth Control Method of AFM-based Nanomachining with Diamond Tip in Deflection Mode

摘要

The equations correlated the normal load and the tip penetration depth were derived through the theoretical analysis of the penetration process of the diamond tip. Verified by experiments, the equations can reflect the penetration process of the scratching machining system and provide theoretical basis for the optimization of depth control algorithm. The control of scratching depth realized in AFM deflection mode can effectively restrain the system drift during scratching process.