ADJUSTABLE SENSITIVITY MEMS MAGNETIC SENSOR

摘要

This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.