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Digital Fabrication Using Electrophotography for Conductive Patterning

机译:使用电子照相电照导电图案化的数字制造

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We modified an electrophotography method used in digital fabrication so that it can eventually be used in a mass production process. Our modification involved partly covering a charge roller with an insulating medium to prevent it from charging at certain points. Therefore, this charge roller can form the same latent image each time directly on a dielectric substrate without a photoreceptor or an optical unit. We demonstrated that our modification worked using a conventional charge roller that was partially wrapped with polyimide film that contained a 20-μm-width penetrating slit. The modified roller was used to charge a dielectric film. The formed latent image was developed with liquid developer of conductive toners. The obtained pattern width of the conductive toner was 20 μm, which is the same as the slit width in the polyimide film. To form an insulating medium in an arbitrary pattern on the surface of a charge roller, we choose a chemical amplification photoresist as the insulating medium. The charge roller material and the photoresist were deposited onto a flat substrate and patterned using conventional photolithography. The results showed the possibility that the photoresist is capable of forming arbitrary patterns on the charge roller material.
机译:我们修改了数字制造中使用的电子照相方法,使得最终可以用于批量生产过程中。我们的修改涉及部分覆盖带绝缘介质的充电辊,以防止其在某些点处充电。因此,该电荷辊可以在没有感光体或光学单元的情况下直接在介电基板上形成相同的潜像。我们证明我们的修改使用常规的电荷辊使用,所述传统的电荷辊部分地用包含20μm宽度穿透狭缝的聚酰亚胺膜包裹。改性辊用于对介电膜充电。形成的潜像用导电调色剂的液体显影剂开发。所获得的导电调色剂的图案宽度为20μm,其与聚酰亚胺膜中的狭缝宽度相同。为了在充电辊表面的任意图案中形成绝缘介质,我们选择化学膨胀光致抗蚀剂作为绝缘介质。将电荷辊材料和光致抗蚀剂沉积在扁平基板上并使用常规光刻图案化。结果表明,光致抗蚀剂能够在电荷辊材料上形成任意图案。

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