室温图案化聚甲基丙烯酸甲酯及在导电高分子中的应用

摘要

通过软印刷技术,利用界面作用力的差异,将聚甲基丙烯酸甲酯(PMMA)图案从软模板表面转移到基底表面.转移过程中具有高效(5s)、室温及无需施加外压的特点.转移时间对PMMA的形貌高度无明显影响,改变旋涂速度和PMMA溶液浓度可以调节PMMA图案的高度.同时,通过氧等离子体刻蚀去除PMMA图案残留层,以此诱导聚吡咯(PPy)原位沉积图案化.%Soft lithography is one of the most promising techniques to achieve patterned surfaces,given its unique advantages,such as high resolution,fast processing speed and high throughput technique for pro-ducing features over a large area without the need of clean room,since it was proposed.In this work,an efficient method was used to prepare patterned PMMA one of the thermoplastic polymers on the hydrophil -ic treatment substrates by soft lithography in air environment and room-temperature conditions without the use of applied pressure in a short time.The key to this successful transfer is that the PDMS mold has a lower surface energy than the hydrophilic treatment substrate,and therefore,the resist layer has better ad-hesion to the substrate.The imprinting time had no significant effect on the morphology of PMMA and changed the spin coating angular speed and PMMA solution concentration can adjust the height of PMMA pattern.Alternatively,the PMMA residual layer was removed by oxygen plasma etching and then polypyr-role(PPy)nanoparticles was deposited to prepare PPy pattern.