Research on a trans-scale inertial stick-slip platform driven by piezoelectric ceramics

摘要

The inertial stick-slip platforms driven by piezoelectric ceramics have comprehensively application in the field of nanomanipulation and nanoassemblies field. In this paper, our investigation is mainly focused on designing and manufacturing a novel structure of inertial stick-slip platform. There are some advantages that higher integration and consistency of every step, more easily changing the friction in fine adjustment, etc. To describe the inertial stick-slip phenomenon exhaustively, the LuGre friction model has been taken into account in the kinetics model. Intuitively, the whole movement of the inertial stick-slip system has been simulated by Matlab, and the result consists of curve of displacement. The prototype has been done some experiments, and the displacement of the inertial stick-slip driving stage has been taken down. Lastly, we compare the curve of displacement and velocity tested by Polytec Laser Vibrometer with the simulation result to verify the accuracy of the kinetics model.