Double closed-loop control of a trans-scale precision positioning stage based on the inertial stick-slip driving

摘要

The piezoelectric-actuated inertial stick-slip device (PAISSD) has been applied extensively. However, it is difficult for the PAISSD to achieve nanometer positioning under large stroke. In addition, the speed of the PAISSD is unstable because of the inconsistent surface roughness and different abrasion. Toward solving these problems, this paper presents a method of double closed-loop control with the speed and the position. First, the position closed-loop method is introduced in detail to achieve rough positioning in the stepping mode. Second, the driving waveform is designed to make the speed and frequency of the PAISSD present a linear relationship and the speed closed-loop performance is theoretically analyzed. Finally, the validity of speed and position double closed-loop is verified via experiments. The positioning accuracy of the PAISSD is 50 nm, and the repeated positioning accuracy is 80 nm. The error of average speed is less than 1.1% and the standard deviation is less than 0.1 mm/s. (C) 2019 Published by Elsevier B.V.