Large Thrust Trans-scale Precision Positioning Stage Based on Inertial Stick-Slip Driving

摘要

For the smaller thrust ,it is difficult to achieve 3D trans-scale precision positioning based on previous stick-slip driving .A large thrust trans-scale precision positioning stage is studied based on the inertial stick-slip driving .The process of the movement is divided into two steps ,i .e .,the″sliding″phase and the″stickness″phase . In the whole process ,the kinematics model of the inertial stick-slip driving is established ,and it reveals some fac-tors affecting the velocity of inertial stick-slip driving .Furthermore ,a simulation of movement is preformed by Matlab-Simulink software ,and the whole process of the inertial stick-slip driving is displayed .After one experi-mental prototype is designed ,the back and forth velocity is tested .Finally ,the simulation verifies the accuracy of the kinematics model .