Numerical Simulation of Electrostatic Comb-drive Actuator Using Reduced Order Modeling Principles

摘要

This paper presents a modeling of lateralelectrostatic Comb Drive actuator and developments a 2D finite element model using reduced order modeling (ROM) principles. This technique reduces the Comb Drive to a group of equivalent lumped parameters finite elements which capture the device behavior. Finally, Simulation results are validated using an analytical approach, both methods give very similar results.