Selective Rapid Thermal Oxidation of Silicon vs. Tungsten using Oxygen in Hydrogen

机译：使用氢气在氢气中选择性快速热氧化硅与钨

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Process behavior associated with the selective oxidation of silicon (Si) vs. tungsten (W) by oxygen (O₂) in hydrogen (H₂) has been studied in Applied materials radiancetrade chamber. New data is obtained for SiO₂ growth on

机译：在应用的材料中研究了与氢气（O _{2 ）中氧化硅（Si）与钨（W）的选择性氧化相关的处理行为（H _{2 ）放射性室。获得新数据，用于SIO _{2 增长}}}

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来源
《International Conference on Advanced Thermal Processing of Semiconductors》|2007年||共7页
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Ripley M.; Balasubramanian R.; Tam N.; Yokota Y.; An Bae Lee; Tae Jung Kim; Chung Hun Lee;
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中图分类 TN305-53;
关键词
Element; Surface; Binary; oxidation; reflectivity; silicon compounds; transmission electron microscopy; tungsten; RadOxtrade solution; Si; Si; SiOlt; subgt; 2lt; /subgt; SiOlt; subgt; 2lt; /subgt; TEM observations; W; W; applied materials radiancetrade chamber; hydrogen gas; oxygen gas;

机译：元素;表面;氧化;反射率;硅化合物;透射电子显微镜;钨;rungoxtrade溶液;si;si;si;si;si;sio＆lt;2＆gt;2＆lt;/ sub＆gt;2＆lt;/ sub＆gt;w;应用材料辐射腔室;氢气;氧气;

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2. Oxygen vacancies in tungsten oxide and their influence on tungsten oxide/silicon heterojunction solar cells [J] . Mews Mathias, Korte Lars, Rech Bernd Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2016,第Pta1期

机译：氧化钨中的氧空位及其对氧化钨/硅异质结太阳能电池的影响
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4. Selective Rapid Thermal Oxidation of Silicon vs. Tungsten using Oxygen in Hydrogen [C] . Ripley, M., Balasubramanian, Advanced Thermal Processing of Semiconductors, 2007 15th International Conference on . 2007

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5. The activation of dioxygen species (oxygen, radical oxygen ion, and hydrogen peroxide) by iron complexes for the selective oxidation and oxygenation of organic substrates [D] . Sheu, Ceshing 1990

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6. Thermally stable single atom Pt/m-Al2O3 for selective hydrogenation and CO oxidation [O] . Zailei Zhang, Yihan Zhu, Hiroyuki Asakura, -1

机译：热稳定的单原子Pt / m-Al2O3用于选择性加氢和CO氧化
7. Oxygen vacancies in tungsten oxide and their influence on tungsten oxide silicon heterojunction solar cells [O] . Mews, M., Korte, L., Rech, B 2016

机译：氧化钨中的氧空位及其对氧化钨硅异质结太阳能电池的影响
8. Selective Hydrogen Passivation of Oxygen-Related Thermal-Donor Clusters in Silicon [R] . Johnson, N. M., Hahn, S. K., Stein, H. J. 1986

机译：硅中氧相关热供体团簇的选择性氢钝化

Selective Rapid Thermal Oxidation of Silicon vs. Tungsten using Oxygen in Hydrogen

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