Research on Ultra-low Feed Servo Control Technology of Ultra-precision Machine Based on Semi-closed Loop Control

摘要

An ultra-precision machine is developed to machine components made of KDP crystal with single point diamond fly cutting technique. This paper presents a compensating control algorithm of error disturbance feed-forward which enhances the stability of ultra-low speed motion of the semi-closed loop feed control servo system of the machine. The simulation results indicate that the values of the steady-state tracking error decreases to 1/10 after using the compensating control algorithm. The fluctuation ratio is less than 4 percent when machining KDP crystal with the feed rate of 60 mu m/s.