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Time and spatial resolved detection of power device failures during wire bonding

机译:电线键合期间电力器件故障的时间和空间分辨检测

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Power semiconductor modules with IGBTs (insulated gate bipolar transistor) in a range from 600 V - 6500 V and up to 200 A per chip are connected with heavy wires of up to 500μm in diameter. The interconnection between Aluminum wires and semiconductor surfaces plays an important role for reliability. Due to the high thermo-mechanical stress the lifetime is limited by wire material and bonding quality. To reach a good connection and a good yield it is important to optimize the bond process and the layout. In this paper a technique is described, which allows to detect time and location of destruction during wire bonding.
机译:具有IGBT(绝缘栅极双极晶体管)的功率半导体模块在600V-6500V和每芯片的范围内,直径高达500μm的重线连接。铝线和半导体表面之间的互连起到可靠性的重要作用。由于高热机械应力,寿命受电线材料和粘合品质的限制。为了达到良好的连接和良好的收益率,优化债券过程和布局很重要。在本文中,描述了一种技术,其允许在引线键合期间检测破坏的时间和位置。

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