Fabrication of Microstructure in Transparent Materials using Femtosecond Laser Irradiation

摘要

We developed a novel method of fabricating a periodic void structure inside a glass using femtosecond laser irradiation. The aligned voids are formed spontaneously with a period of micrometer length along the propagation direction of the fs laser beam. In addition, structur parameters of the void array, i.e., the period between voids, the number of voids, and the entire length of the aligned structure, can be controlled by adjusting the laser irradiation conditions. The ability to easily fabricate such controllable periodic void structure guarantees applicability in optoelectronics areas, such as 3D photonic crystals.