Reference Materials in Microdimensional Metrology

摘要

Today a growing number of mass-produced manufactured goods have either dimensional tolerances or dimensioned features themselves which are of the order of one micrometer or less. Figure 1 shows both the dimensions and tolerances of such state-of-the-art goods, including: 125 km diameter telecommunication optical fibers with 0.2 μm tolerances; 0.5 μm-wide integrated circuit device elements with 0.05 pm tolerances; and, at the limit of small dimensions and tolerances of commercially produced goods, 0.01 μm thick quantum-well lasers with 0.5 nm tolerances [1].