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Conduction and Low-Frequency Noise: Diagnostic Tools for Low-Temperature (<600°C) Polysilicon Thin Film Transistor Technology

机译:传导和低频噪声:低温(<600°C)多晶硅薄膜晶体管技术的诊断工具

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In this contribution, experimental facts about conduction and low frequency noise in TFTs are presented giving insight in the correlation between noise in n-type TFTs and their technology, electrical performances and reliability. The conduction and fluctuation mechanisms in polysilicon TFTs are described emphasizing the role of the grain boundary potential barriers. It is experimentally shown that the drain current is thermally activated. In addition, a similar transition between two regimes is observed in function of gate bias for both conduction and noise. Then, the noise temperature dependence investigation shows a thermal deactivation of the drain current spectra density. The relation between noise intensity and grain boundary potential barrier is detailed, allowing the extraction of pertinent parameters, which characterize the noise and potential barrier height variance. This information is useful to optimize the material growth and the process fabrication of the TFTs for improvement of the device performances.
机译:在这方面的贡献,被呈现给在n型TFT噪声和他们的技术,电气性能和可靠性之间的关系的见解约传导和低频噪声TFT中的实验事实。在多晶硅TFT的导通和波动机制描述强调的晶界势垒的作用。据实验表明,漏极电流被热激活。此外,两个状态之间进行类似的转换在两个传导和噪声栅极偏压的函数,观察到。然后,噪声温度依赖性的调查显示的漏极电流密度的光谱的热失活。噪声强度和晶界势垒之间的关系被详细描述的,允许相关的参数,其表征噪声和势垒高度变化的提取。这个信息是优化材料生长和TFT的改进的器件性能的过程制造是有用的。

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