Purification of Trace Amount of Metal Impurity from Ultra Pure Water Using Membrane Purifier/Filter

摘要

The metal removal performance of two IE membranes evaluated under practical conditions were compared. Using model solutions, with multiple metal contamination and colloidal impurity containing UPW, for filtration experiment the superiority of metal removal was shown for IE membrane A compared to IE membrane B. The advantage of metal purifier/Filter for UPW line in microelectronics device manufacturing was demonstrated.