Force-Feedback-Assisted Micromachining for Spark Assisted Chemical Engraving (SAGE)

摘要

Spark Assisted Chemical Engraving (SACE) is a process for low-cost micromachining of non-conductive materials like glass. One of the well-known drawbacks of SACE is the low repeatability, which is caused by fluctuations in the gas film around the tool electrode. In this contribution we outline a strategy for improved process repeatability based on closed-loop control of the tool electrode contact force. The SACE micromachining setup is presented, 011 which prototyping is performed in either automatic mode or controlled by a force-feedback joystick.