Driven by the requirements of smaller size and lower cost, utilizing silicon mechanical devices as replacement of quartz crystals for frequency sources in the systems has become an attraction for designers. Unlike the traditional applications of micro-electro mechanical systems (MEMS) where the sensitivity to the environment needs to be maximized, MEMS oscillators ought to be nearly insensitive to all environmental parameters. As a result, in order to commercialize silicon MEMS resonators, not only the design needs to be streamlined through requirements of stability from all angles, but also the manufacturing processes need to keep resonator output frequency insensitive to all environmental parameters. This paper presents silicon resonator technology from manufacturing point of view: including basic resonator designs, fabrication processes, and wafer level vacuum packages - all with conventional materials and technologies. At last data is shown7 to prove both the design and the manufacturing process reliable over standard reliability conditions. Thus we concluded that MEMS oscillators could provide an excellent low cost solution for electronic systems in high volume.
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