MEMS OSCILLATOR, MANUFACTURING METHOD FOR MEMS OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING BODY

摘要

PROBLEM TO BE SOLVED: To provide a MEMS oscillator in which a change in oscillation frequency is restricted.;SOLUTION: A MEMS oscillator 1 comprises: an insulation part 12; a first electrode 22 provided on the main surface of the insulation part; a function part 40; and a second electrode 24 provided on the main surface 12a side of the first electrode via a gap. The second electrode includes: a basal part 31; a fixed part 36 extended from the basal part in a first direction orthogonal to the main surface; a first arm part 32 extended from the basal part in a second direction orthogonal to the first direction; and a second arm part 34 extended from the basal part in the second direction besides the first arm. In a plane view of the first electrode and second electrode, the first electrode is provided so as to overlap parts of the first arm and second arm, and the fixed part is connected to the function part in the second electrode.;COPYRIGHT: (C)2014,JPO&INPIT