Perspectives for ultra high density nonvolatile data storage

摘要

Nonvolatile memories based on charge storage currently dominate the high density data flash market. In the short and medium term, multi-level floating gate in NAND array architecture as well as NROM dual bit feature low cost per bit and simplicity of processing and thus are likely to have largest market share. We review these technologies and discuss scalability issues as well as alternative FinFET type device architectures to overcome roadblocks. Finally, we briefly address emerging memories in particular resistive memories which could replace charge storage based memories on the long run.