Design and Simulation of a Micromachined Accelerometer

摘要

The model parameters of the micromachined tunneling accelerometer have a significant effect on the accelerometer's performance, including its range, bandwidth, sensitivity, accuracy and even the interfacing circuitry. This paper presents the design, simulation and development of a low voltage micromachined tunneling microaccelerometer and the effects of parameter on the accelerometer's performance. The derivation of the sensing accelerometer model will be discussed. With the use of the MATLAB simulation program, the real world effects of the various parameters are revealed.