PARTICLE SIZING AND COUNTING USING A NEW LASER LIGHT SCATTERING DETECTION TECHNIQUE ON SILICON WAFER SURFACES

摘要

In this work, it is investigated particle sizing and counting using a new geometry to detect light scattering from small particles intentionally and sparsely deposited onto silicon wafer surfaces. That new geometry consists of a rotating mirror curved as a semi-circumference with radius of 85 mm and width of 20 mm, which collects the scattered light and concentrates it on the window of a photomultiplier (PMT) detector. In addition, bare and oxidized (100) silicon surfaces were intentionally contaminated with latex microspheres with diameters of 1.1 and 5.0 p.m. As a result, the collected intensity I(