Pt, Pd, Ni metallic thin films deposited by pulsed laser ablation

摘要

We have investigated thin films of Ni, Pt, Pd, Ni-Pt and Ni-Pd deposited by pulsed laser ablation. Our study was focused on the correlation of layer morphology and composition vs. synthesis parameters (material, laser fluence and wavelength). In order to obtain bimetallic films we alternatively irradiated two different metal targets. A Nd:YAG laser (λ = 355 and 532 nm, 5 ns pulse duration, fluence 15-30 J/cm~2) was used. Film analysis was made by AFM and RBS. The synthesized layers had a roughness (Ra) between 15 and 40 nm for Pt and Pd and between 80 and 120 nm for Ni. The rate deposition was in the range of 0.04-0.8 A. In the composite layers, in condition of equally radiated targets, the Ni/Pd at. concentration was 50/50%, while for the Ni/Pt layer was 30/70%.