METHOD FOR MANUFACTURING THIN FILMS BY LASER ABLATION BY APPLYING LASER PULSES WITH A ROTATING TARGET

摘要

The present invention introduces a method for manufacturing thin films by pulsed laser deposition technology so that the target (15) has essentially an annular cross-section, and laser pulses (12', 12a', 12b') are directed to the inner or outer surface of the target from at least one laser source (11, 11a, 11b). In the invention the target (15) is brought to a rotational movement, and the latest optical element (13, 13a, 13b) directing the pulses to the target can be placed farther away from the target (15), which thus facilitates the protection of the optical elements from contamination.