Laser micro-machining of high density optical structures on large substrates

摘要

A new laser mask projection technique, Synchronised Image Scanning (SIS), has been developed for the efficient fabrication of dense arrays of repeating microstructures on large area substrates. This paper details the technique and provides specific examples of the type of structures that can be produced. SIS allows for major improvements in the accuracy and speed with which 3D patterns can be created over large areas by laser ablation. An add-in for CAD software has been developed to build up linear feature arrays for the mask from 3D designs. Feature sizes down to a few microns can be produced with excellent surface quality. Large arrays of microstructures have wide ranging applications in many areas. One example is the machining of large polymer master panels that are then electroformed to produce a mould for replication for the manufacture of display enhancement films.