MICRO-MACHINING METHOD USING LASER INDUCED PLASMA TO PRECISELY MACHINE A TRANSPARENT SUBSTRATE

摘要

PURPOSE: A micro-machining method using laser induced plasma is provided to reduce defects caused by fine crack in a transparent substrate and prevent damage due to thermal deformation, thermal transition and thermal strain.;CONSTITUTION: A micro-machining method using laser induced plasma comprises steps of: mounting a metal specimen in a laser machining device(S100), focusing a laser on the surface of the metal specimen(S200), positioning a transparent substrate between the laser and the metal specimen(S300), irradiating the laser onto the metal specimen to generate plasma(S400), and machining the back side of the transparent substrate with the plasma(S500).;COPYRIGHT KIPO 2011