Varian Inc.'s New Turbo-V 2K-G Turbomolecular Vacuum Pump for Thin Film Deposition

摘要

Varian Incorporated proudly introduced the latest turbomolecular pump technology designed to help users achieve superior thin film deposition production. The Varian Turbo-V 2K-G is designed as an "application specific" pump for vacuum coating applications. Working closely with several companies during the development stages, highly desirable performance characteristics and design features were incorporated to improve a user's experience with the product. The rugged design allows for cost-effective performance in high gas load applications, including glass coating and deposition, as well as storage and display manufacturing.