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Method for assembling a single-flow turbomolecular vacuum pump, and a turbomolecular vacuum pump assembled by said method
Method for assembling a single-flow turbomolecular vacuum pump, and a turbomolecular vacuum pump assembled by said method
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机译:组装单流涡轮分子真空泵的方法以及通过该方法组装的涡轮分子真空泵
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摘要
A method for assembling a single-flow turbomolecular vacuum pump and a turbomolecular vacuum pump assembled by a method wherein the pump rotor, rotor shaft, antifriction bearings and motor armature are first assembled to form a unit, balanced outside of the pump casing, and thereafter introduced as a unit into the pump casing and mounted therein.
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