Centre for Advanced Technology, Indore has taken up an indigenous development of a medium size Turbo Molecular Pump. A rotor geometry optimization was carried out for getting higher pumping speed and compression ratio by varying various rotor geometry parameters. As per optimized parameters fabrication of various components was carried out. A complex multistage rotor geometry and suitable stators have been fabricated for the first full scale medium capacity TMP. The dynamic balancing of the rotor-motor system was also carried out using the in-house dynamic balancing setup. The dynamic balancing was performed stage wise up to full operating speed. A new microprocessor controlled based TMP power supply has also been developed with various safety interlocks and provision of controlling various operational parameters of TMP. A PC interface for remote operation has also developed. An ultimate of 4.06 x 10~(-8) mbar vacuum has been obtained. This paper describes the details of development of various components and initial results.
展开▼
