Loss optimization and thermal analysis of a heteropolar magnetic bearing for a vacuum turbo-molecular pump

摘要

Compared with the traditional vacuum turbo-molecular pumps (TMPs) with oil-lubricated bearings, magnetically suspended TMPs can obtain an ultra-clean and ultra-high vacuum environment. Considering the poor heat dissipation condition of rotor and miniaturization of industrial applications, this paper focuses on loss optimization and thermal analysis of a het-eropolar magnetic bearing (HeMB) for a vacuum TMP. Loss and mass of HeMB were minimized with multi-objective genetic algorithm optimization. Thermal performance predictive calculation is conducted by analytical model and by finite element method (FEM), respectively. To verify the optimization design and anylysis, the relative tests were implemented on a prototype. For the mechanical and electrical products applied in vacuum, loss optimization and thermal analysis at design stage are very important to the implementation of the system performance.