Charge-voltage characteristics of nonharmonically modulated plasma boundary sheaths

摘要

The dynamics of capacitively coupled RF discharges (RF-CCPs) is controlled by the charge-voltage characteristics of the plasma boundary sheath; this characteristics depends in turn on the details of the RF modulation. We study this dependence on the basis of a collision-dominated fluid model. Comparison with a much more demanding particle-in-cell (PIC) simulation yields reasonably good agreement.